ACM Research Launches Furnace Tool for Power Device Industry to Address IGBT Process Challenges

New Ultra Fn Capability Improves Performance of the Alloy Anneal Process Used in IGBT Device Manufacturing

Fremont, Calif. – Dec. 17, 2020 – ACM Research, Inc. (ACM) (NASDAQ: ACMR), a leading supplier of wafer processing solutions for semiconductor and advanced wafer-level packaging applications, today introduced alloy anneal capabilities for its Ultra Fn Furnace tool to extend its furnace product line to power device manufacturers. The new capabilities are critical to meet the ever-increasing production requirements of insulated gate bipolar transistor (IGBT) devices as transistors get thinner, smaller and faster.

According to industry research firm Mordor Intelligence, “The IGBT market was valued at USD 5.4 billion in 2019, and it is expected to reach USD 9.38 billion by 2025, at a CAGR of 9.66%, during the forecast period (2020-2025). The broad application range of IGBTs lured several new companies to venture into the market. IGBT activates/modifies electrical energy in several modern appliances, such as cookers, microwaves, electric cars, trains, variable-frequency drives (VFDs), variable speed refrigerators, air conditioners, lamp ballasts, municipal power transmission systems, and stereo systems, which are well-equipped with switching amplifiers.”1

In addition to rapid end-market growth, manufacturing requirements for IGBT are also increasing as chip technology becomes more advanced. Today’s IGBT applications, particularly EVs, require faster switching capabilities, increased power efficiency, and higher power density.

“Today’s IGBT devices must be smaller, faster and thinner than ever,” said David Wang, CEO of ACM Research. “ACM entered this product category earlier this year with our Thin Wafer Backside Cleaning System. We have built on our experience and understanding of power device manufacturing to add alloy anneal capabilities to the Ultra Fn. This extends our furnace product offering from foundry customers to now include power device customers.”

The Ultra Fn Furnace tool with alloy anneal capabilities is customized to perform anneal processes under protective inert gas, reductive gas conditions or high vacuum conditions down to the micro-Torr level. With the special design in the wafer handling system, process tube and boat, it also can be applied for thin wafers or taiko wafers. The system is intended for batch processing of up to 100 12-inch (300mm) wafers. The applications of the Ultra Fn system also can be extended into the low pressure chemical vapor deposition (LPCVD) process for SIN, HTO, un-doped poly and doped poly deposition, gate oxide deposition process, ultra-high temperature processes up to 1200°C, and atomic layer deposition (ALD). 

ACM delivered its first tool customized for alloy anneal processing early this December to a power device manufacturer in China. Contact ACM to learn how the Ultra Fn Furnace tool can be customized to your specifications.

 

About ACM Research, Inc.

ACM develops, manufactures and sells semiconductor process equipment for single-wafer or batch wet cleaning, electroplating, stress-free polishing and thermal processes that are critical to advanced semiconductor device manufacturing as well as wafer-level packaging. The company is committed to delivering customized, high-performance, cost-effective process solutions that semiconductor manufacturers can use in numerous manufacturing steps to improve productivity and product yield.

The ACM Research logo is a trademark of ACM Research, Inc. For convenience, this trademark appears in this press release without a ™ symbol, but that practice does not mean that ACM will not assert, to the fullest extent under applicable law, its rights to the trademark.

  1. https://www.mordorintelligence.com/industry-reports/insulated-gate-bipolar-transistor-igbt-market

  #  #

Media Contact : Company Contacts :
Eric Lawson U.S.
Kiterocket Robert Metter
+1-480-276-9572 ACM Research, Inc.
Email Contact +1-503-367-9753
   
  Europe
  Sallyann Henry
  ACM Research, Inc.

 

+43-660-7769721

 

 

 

China

 

Xi Wang

 

ACM Research (Shanghai), Inc.

 

+86-21-50808868

 

 

 

Korea

 

YY Kim

 

ACM Research (Korea), Inc.

 

+82-10-41415171

 

 

 

Subsidiary Contacts:

 

Singapore

 

Adrian Ong

 

+65-8813-1107

 

 

 

Taiwan

 

David Chang

 

+886-921-999-884

Featured Video
Editorial
Jobs
Senior Principal Mechanical Engineer for General Dynamics Mission Systems at Canonsburg, Pennsylvania
GEOGRAPHIC INFORMATION SYSTEM (GIS) COORDINATOR for Lassen County at Susanville, California
Geodetic Analyst, GIS Center (1282) for Idaho State University at Pocatello, Idaho
GIS Analyst for San Bernardino County Transportation Authority at San Bernardino, California
Upcoming Events
IMTS 2024 – The International Manufacturing Technology Show at McCormick Place 2301 S Lake Shore Dr Chicago IL - Sep 9 - 14, 2024
FABTECH Orlando 2024 at Orange County Convention Center Orlando FL - Oct 15 - 17, 2024
TIMTOS 2025 at Nangang Exhibition Center Hall 1 & 2 (TaiNEX 1 & 2) TWTC Hall Taipei Taiwan - Mar 3 - 8, 2025



© 2024 Internet Business Systems, Inc.
670 Aberdeen Way, Milpitas, CA 95035
+1 (408) 882-6554 — Contact Us, or visit our other sites:
AECCafe - Architectural Design and Engineering EDACafe - Electronic Design Automation GISCafe - Geographical Information Services TechJobsCafe - Technical Jobs and Resumes ShareCG - Share Computer Graphic (CG) Animation, 3D Art and 3D Models
  Privacy PolicyAdvertise